In Situ Synthesis of ZIF-67 Thin Films Using Low Temperature Chemical Vapor Deposition to Fabricate All-Solid-State Flexible Interdigital in-Planar Microsupercapacitors

This work describes the fabrication of a flexible all-solid-state interdigital in-planar microsupercapacitor (μSC) using in situ synthesized ZIF-67 thin films as finger-electrode materials, platinum (Pt) film current collector, laser print technology for patterns, and low-cost commercial polyethylene terephthalate (PET) sheet substrates, assembled with NaOH/PVA gel electrolyte. are onto PET substrate by ultralow temperature (ULT) chemical vapor deposition (CVD) at low 140°C. We herein report ULT CVD approach gas phase synthesizing films, exactly heating can produce vaporized water steam, sublimated 2-methylimidazole (2-MIM) cobalt(II) acetylacetonate (Co(acac)2) vapors same time. The gaseous precursors demonstrated molecular-level reactions, including deprotonation 2-MIM via following coordinated reactions cobalt ions decomposed from Co(acac)2, efficiently straightforward to form uniform surface. Herein, integration pattern printing, depositing lift-off patterning processes comprehensive achievement good compatibility integrate MOFs into miniaturized energy-storage devices.